Microelectromechanical systems (MEMS) are the devices that combine microelectronic and micromechanical elements.
The MEMS conception implies the use of both mechanical movable element and a specialized signal processing circuit to form a complete microsystem or a part of reconfigurable RF transmission line.
The principle of RF MEMS is based on the mechanical deformation of a movable structural element (membrane) under electrostatic force after the application of DС voltage to the control electrode. The mechanical deformation leads to a change in space between the electrodes.
This effect allows to implement multistep devices with reconfigurable capacitance, multichannel switches, inductors, variable capacitors, resonators and filters.
We a full cycle of RF MEMS design and manufacturing:
- Technology development
- Design of the device
- Mechanical, thermal and electromagnetic modelling
- Manufacturing supervision
- Testing and reliability measurements