Microelectromechanical systems (MEMS) are the devices that combine microelectronic and micromechanical elements.

The MEMS conception implies the use of both mechanical movable element and a specialized signal processing circuit to form a complete microsystem or a part of reconfigurable RF transmission line.

The principle of RF MEMS is based on the mechanical deformation of a movable structural element (membrane) under electrostatic force after the application of DС voltage to the control electrode. The mechanical deformation leads to a change in space between the electrodes.

This effect allows to implement multistep devices with reconfigurable capacitance, multichannel switches, inductors, variable capacitors, resonators and filters.

We a full cycle of RF MEMS design and manufacturing:

  • Technology development
  • Design of the device
  • Mechanical, thermal and electromagnetic modelling
  • Manufacturing supervision
  • Testing and reliability measurements